The clean room uses different levels of clean air (primary, medium, high) clean air to dilute the polluted air in the room or use the piston effect to apply clean air to squeeze the polluted air out of the clean room to achieve different cleanliness. Therefore, the air volume of the clean air conditioning system is the key to ensuring cleanliness. The air volume calculation mainly considers the following factors:
1. Non-unidirectional flow clean room is generally applicable to grades 6, 7, 8, and 9 (that is, the original US Federal Standard FS-209E is 1000, 10,000, and 100,000). The clean room with low cleanliness requirements is Diluted to achieve a certain degree of cleanliness, the required air volume is correspondingly small, the value of the air supply is generally determined by the number of air changes per hour, and the amount of air required to eliminate the heat and cold load is also checked. .
2. The air volume of the clean room in the unidirectional flow is determined by the flow velocity of the clean room section. It must be stated here that the values ​​of the lower limit and the upper limit are a reasonable range of values, and the viewpoint that the higher the cross-section wind speed is, the higher the cleanliness level is considered. The level of cleanliness is also related to the filtration efficiency of high-efficiency filters, and is related to the particle size of the filtered particles. Do not blindly pursue excessive cross-section wind speed and high air volume.
3. The airflow velocity in the clean room work area should also meet the requirements of the production process and the health of the indoor workers.
4. Determination of the fresh air volume of the clean room air conditioning system. The fresh air volume of the clean room air conditioning system is to compensate the air volume of the process air in the clean room and to maintain the sum of the positive air pressure, and to ensure the fresh air volume of not less than 40m3 per person per hour in the clean room. value. However, it must be emphasized here that the demand for fresh air volume in clean air conditioning systems is larger than that of ordinary air conditioning systems. In addition to meeting the above requirements, it is necessary to strictly control the amount of fresh air. The energy consumption required for fresh air treatment is very large. The strict control of fresh air volume is a clean air conditioning system. An important energy saving measure.
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